Evaluation of phase, composition, microstructure and properties in TiC/a-C:H thin films deposited by magnetron sputtering-Reference-Cited by-同舟云学术

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Evaluation of phase, composition, microstructure and properties in TiC/a-C:H thin films deposited by magnetron sputtering

Published:2005-01 Issue:3-4 Volume:239 Page:302-310
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Gulbiński W.,Mathur S.,Shen H.,Suszko T.,Gilewicz A.,Warcholiński B.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference22 articles.

1. H.O. Pierson, Handbook of Refractory Carbides and Nitrides, Noyes, Park Ridge, NJ, 1996.

2. The search for novel, superhard materials

3. Structural characterization of TiCx films prepared by plasma based ion implantation

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