MEMS Residual Stress Characterization-Reference-Cited by-同舟云学术

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MEMS Residual Stress Characterization

Published:2015 Issue: Volume: Page:398-412
ISSN:
Container-title:Handbook of Silicon Based MEMS Materials and Technologies
language:
Short-container-title:

Author:

Chen Kuo-Shen,Ou Kuang-Shun

Publisher

Elsevier

Reference110 articles.

1. Science-based MEMS reliability methodology;Tanner;Microelectron. Reliab.,2007

2. Techniques in residual stress measurement for MEMS and their applications;Chen,2006

3. Micromechanics and MEMS: Classic and Seminal Papers to 1990,1997

4. Fundamentals of Microfabrication;Madou,1997

5. Micromachined Transducers Sourcebook;Kovacs,1998

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