1. (J): written in Japanese; (J * E): written in Japanese, but with abstract, tables and figures in English; (E) or no letter: written in English.
2. Chemical Contamination in Semiconductor Manufacturing Process and Countermeasures Against It,1997
3. Forecast of Airborne Molecular Contamination Limits for the 0.25 Micron High Performance Logic Process;Kinkead,1995
4. Sophisticated Routine Ultratrace Analysis of Atoms and Molecules in the Semiconductor Industry;Fabry,1996
5. New Concepts for Process-Relevant Ultratrace Analysis in Semiconductor Technology;Schäfer;Fresenius J. Anal. Chem.,1992