1. Absolute pressure sensors by air-tight electrical feedthrough structure;Esashi;Sensors and Actuators A,1990
2. Silicon resonant angular rate sensor using electromangnetic excitation and capacitive detection;Hashimoto;Journal of Micromechanics and Microengineering,1995
3. V. Fascio, R. Wuthrich, D. Viquerat, H. Langen, 3D microstructuring of glass using electrochemical discharge machining (ECDM), in: Proceedings of the International Symposium of Micromechatronics and Human Science, Nagoya, 23–26 Nov., 1999, pp. 179–183.
4. Removable tubing interconnects for glass-based micro-fluidic systems made using ECDM;Lee;Journal of Micromechanics and Microengineering,2004
5. The anode effect;Taylor;Transactions of the Electrochemical Society,1925