Diagnostic technique for laser micromachining of multi-layer thin films
Author:
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference12 articles.
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2. Laser-LIGA for serpentine Ni microstructures;Jin;Proceedings of SPIE,2001
3. Acoustic wave monitoring of the excimer laser ablation of YBCO high-Tc superconductor;Dogas;Applied Physics A,2001
4. Initial formation process of laser-induced plasma shock wave in air;Chen;Optics Communications,2000
5. Stress generated in polymide by excimer-laser irradiation;Zweig;Journal of Applied Physics,1993
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