A four-degrees-of-freedom microstage for the compensation of eccentricity of a roundness measurement machine

Author:

Liu Chien Hung,Jywe Wen-Yuh

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference8 articles.

1. Vertical micro positioning system using PZT actuator;Goto;Bull. Japan Soc. Prec. Eng.,1988

2. Ultra precision wafer positioning by six-axis micro-motion mechanism;Taniguchi;Int. J. Japan Soc. Prec. Eng.,1992

3. A six degrees of freedom fine motion mechanism;Henmi;Mechatronics,1992

4. Design and characterization of a low-profile micropositioning stage;Yang;Prec. Eng.,1996

5. To improve work-piece roundness in precision diamond turning by in-situ measurement of a control;James Li;Mechatronics,1996

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