Using IoT technology for computer-integrated manufacturing systems in the semiconductor industry

Author:

Chen Yu-QiangORCID,Zhou Biao,Zhang Mingming,Chen Chien-MingORCID

Funder

National Natural Science Foundation of China

Science and technology project of Guangdong Province, China

Guangdong Provincial Department of Education Technology Platform Project, China

Guangdong Philosophy and Social Sciences Project, China

Guangzhou Science and Technology Project, China

Dongguan Polytechnic Research Fund Project, China

Publisher

Elsevier BV

Subject

Software

Reference46 articles.

1. Y.L. Chang, H. Chang, TSMC RFID solution design for 300mm FAB, in: TSMC MIT e-Operations Symposium, 2004.

2. Applications of RFID technology and smart parts in manufacturing;Li,2004

3. M. Lin, P.D. Cheng, R. Lin, J. You, Use RFID as a lot identification system with low cost and high feasibility, in: TSMC MIT e-Operations Symposium, 2004.

4. H.M. Kuq, F.N. Wu, Implementation of test lot for RFID solution, in: TSMC MIT e-Operations Symposium, 2004.

5. C.J. Huang, FAB10 detail design document for FAB10 RFID project, in: TSMC MIT e-Operations Symposium, 2014.

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