Anticipatory transport system with hybrid linear and nonlinear forecasting using streaming wafer process data
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Published:2022-08
Issue:
Volume:125
Page:109122
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ISSN:1568-4946
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Container-title:Applied Soft Computing
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language:en
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Short-container-title:Applied Soft Computing
Author:
Yoo DonggunORCID,
Kim Wooseok,
Park Sangho,
Oh Bora,
Kim Haejoong,
Lee SangminORCID