Anticipatory transport system with hybrid linear and nonlinear forecasting using streaming wafer process data-Reference-Cited by-同舟云学术

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Anticipatory transport system with hybrid linear and nonlinear forecasting using streaming wafer process data

Published:2022-08 Issue: Volume:125 Page:109122
ISSN:1568-4946
Container-title:Applied Soft Computing
language:en
Short-container-title:Applied Soft Computing

Author:

Yoo Donggun^ORCID,Kim Wooseok,Park Sangho,Oh Bora,Kim Haejoong,Lee Sangmin^ORCID

Publisher

Elsevier BV

Subject

Software

Reference38 articles.

1. Practical routing algorithm using a congestion monitoring system in semiconductor manufacturing;Lee;IEEE Trans. Semicond. Manuf.,2018

2. A variable neighborhood search heuristic algorithm for production routing problems;Qiu;Appl. Soft Comput.,2018

3. Iterative two-stage hybrid algorithm for the vehicle lifter location problem in semiconductor manufacturing;Lee;J. Manuf. Syst.,2019

4. Deep learning-based dynamic scheduling for semiconductor manufacturing with high uncertainty of automated material handling system capability;Kim;IEEE Trans. Semicond. Manuf.,2020

5. A simulation optimization method for vehicles dispatching among multiple container terminals;Tao;Expert Syst. Appl.,2015

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