Nanoindentation and nanoscratching analysis of high transparent F:SiOx thin films deposited by plasma polymerization

Author:

Abbasi-Firouzjah MarziehORCID,Shokri Babak

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference48 articles.

1. Comparison of various low dielectric constant materials;Cheng;Thin Solid Films,2018

2. Growing invisible silica nanowires on fused silica plates provides highly transparent and superwetting substrates;Tsai;Appl. Surf. Sci.,2019

3. Metal barrier induced damage in self-assembly based organosilica low-k dielectrics and its reduction by organic template residues;Krishtab;Appl. Surf. Sci.,2019

4. Synthesis of transparent and hard SiOC(−H) thin films on polycarbonate substrates by PECVD method;Noborisaka;Surf. Coat. Technol.,2012

5. One-step sol-gel preparation of ultralow-refractive-index porous coatings with mulberry-like hollow silica nanostructures;Zou;Surf. Coat. Technol.,2018

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