Hydrogenated nanocrystalline silicon thin film prepared by RF-PECVD at high pressure
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
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1. Effect of the RF Power of PECVD on the Crystalline Fractions of Microcrystalline Silicon (μc-Si:H) Films and Their Structural, Optical, and Electronic Properties;Electronic Materials;2023-06-22
2. Effects of Chamber Pressures on the Passivation Layer of Hydrogenated Nano-Crystalline Silicon Mixed-Phase Thin Film by Using Microwave Annealing;Electronics;2021-09-08
3. Improving structural, optical, and electrical properties of μc-Si:H using non-uniform hydrogen dilution treatment on RF-PECVD prepared layers;Materials Science in Semiconductor Processing;2021-07
4. White electroluminescence from SiNx thin films by a PECVD equipment using dichlorosilane precursor and study of emission mechanism;Materials Technology;2019-04-15
5. Optical, structural evolution and surface morphology studies of hydrogenated silicon films synthesized by rf-magnetron sputtering: Effects of pressure and radio frequency power at low temperature;Optik;2018-09
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