Comparison of optical and chemical properties of thermally evaporated and spin-coated chalcogenide As S thin films targeting electron beam lithography applications-Reference-Cited by-同舟云学术

Comparison of optical and chemical properties of thermally evaporated and spin-coated chalcogenide As S thin films targeting electron beam lithography applications

Published:2019-03 Issue: Volume:508 Page:7-14
ISSN:0022-3093
Container-title:Journal of Non-Crystalline Solids
language:en
Short-container-title:Journal of Non-Crystalline Solids

Author:

Palka Karel,Jancalek Jiri,Slang Stanislav,Grinco Marina,Vlcek Miroslav

Funder

Grant Agency of the Czech Republic

Ministry of Education, Youth and Sports of the Czech Republic and European Regional Development Fund-Project

Modernization and upgrade of the CEMNAT

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference37 articles.

1. Amorphous Chalcogenide Semiconductors and Related Materials;Tanaka,2011

2. Deposition Techniques for Chalcogenide Thin Films, Chalcogenide Glasses;Orava,2014

3. Spin‐coated amorphous chalcogenide films

4. Preparation of arsenic sulfide thin films for integrated optical elements by spiral bar coating

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