The influence of Ar pressure on the structure and optical properties of non-hydrogenated a-Si thin films grown by rf magnetron sputtering onto room-temperature glass substrates-Reference-Cited by-同舟云学术

The influence of Ar pressure on the structure and optical properties of non-hydrogenated a-Si thin films grown by rf magnetron sputtering onto room-temperature glass substrates

Published:2019-08 Issue: Volume:517 Page:32-43
ISSN:0022-3093
Container-title:Journal of Non-Crystalline Solids
language:en
Short-container-title:Journal of Non-Crystalline Solids

Author:

Márquez E.,Saugar E.,Díaz J.M.,García-Vázquez C.,Fernández-Ruano S.M.,Blanco E.,Ruiz-Pérez J.J.,Minkov D.A.

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference54 articles.

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