Plasma diagnostics in silane–methane–hydrogen plasmas under pm-Si1−xCx:H deposition conditions: Correlation with film properties
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
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4. γ-Al2O3nanoparticle production by arc-discharge in water:in situdischarge characterization and nanoparticle investigation;Journal of Physics D: Applied Physics;2009-11-30
5. Experiment and modelling of very low frequency oscillations in RF-PECVD: a signature for nanocrystal dynamics;Plasma Sources Science and Technology;2008-07-31
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