Maskless patterning of borosilicate glass surface using nanoindentation-induced etch-hillock phenomena
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
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1. Photosensitivity and directly UV written waveguides in an ion exchangeable bulk oxide glass
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1. An improved scanning probe-based lithography: Site-controlled formation of self-assembled film as an etch mask;Microelectronic Engineering;2021-05
2. Locally Enhanced Dissolution Rate as a Probe for Nanocontact-Induced Densification in Oxide Glasses;Langmuir;2012-07-11
3. Investigation of Nanoscratch Processes in Semiconductor Materials for Application to Maskless Patterning;Journal of Nanoscience and Nanotechnology;2008-06-01
4. Microstructuring of Glasses;Springer Series in Materials Science;2008
5. Periodic Arrays of Micrometer and Sub-micrometer Magnetic Structures Prepared by Nanoindentation of a Nonmagnetic Intermetallic Compound;Advanced Materials;2006-07-04
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