Structural and morphological studies on SiOxNy thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. Charge trapping and carrier transport mechanism in silicon-rich silicon oxynitride
2. Prediction of surface microtrenching by using neural network
3. XAFS characterization of buried SixNyOz samples
4. Short Range Order and the Nature of Defects and Traps in Amorphous Silicon Oxynitride Governed by the Mott Rule
5. Short-range order in non-stoichiometric amorphous silicon oxynitride and silicon-rich nitride
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Infrared study of the structure of silicon oxynitride films produced by plasma enhanced chemical vapor deposition;Journal of Non-Crystalline Solids;2023-10
2. Improving the oxygen barrier properties of PET polymer by radio frequency plasma-polymerized SiOxNy thin film;Surface and Coatings Technology;2019-01
3. Role of Hydrogen and Nitrogen on the Surface Chemical Structure of Bioactive Amorphous Silicon Oxynitride Films;The Journal of Physical Chemistry B;2017-09-14
4. One-Step Synthesis of Silicon Oxynitride Films Using a Steady-State and High-Flux Helicon-Wave Excited Nitrogen Plasma;Plasma Chemistry and Plasma Processing;2017-05-19
5. Photoluminescence of erbium in SiOxNy alloys annealed at high temperature;Journal of Alloys and Compounds;2014-04
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