Mechanisms of formation of sputtered particles in excited states at Ar+ ion bombardment of oxide targets
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference7 articles.
1. Effect of oxide band structure on the emission process of excited atoms under ion bombardment
2. A bond breaking model for secondary ion emission
3. Line shape measurements of atoms sputtered from polycrystalline Cu, Zn, and Al by 300 keV Ar+ bombardment
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