Mechanisms of formation of sputtered particles in excited states at Ar+ ion bombardment of oxide targets

Author:

Bobkov V.V.,Gokov S.P.,Gritsyna V.V.,Gritsyna V.T.,Shevchenko D.I.,Alimov S.S.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Ion-photon emission from titanium target under ion beam sputtering;Nuclear Physics and Atomic Energy;2021-12-25

2. Optical emission from the interaction of highly charged Xeq+ (6 ≤ q ≤ 23) ions with GaAs surface;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2018-12

3. Influence of type of bonds in compounds on the mechanism of the sputtered excited particles formation under ion bombardment;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2016-11

4. Photon emission produced by Kr+ ions bombardment of Cr and Cr2O3 targets;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-01

5. Characteristic features of ion-photon emission from yttrium–iron garnets;Vacuum;2012-04

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