Production of liquid cluster ions and their application to surface etching-Reference-Cited by-同舟云学术

Production of liquid cluster ions and their application to surface etching

Published:2006-01 Issue:1-2 Volume:242 Page:100-103
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Takaoka G.H.,Noguchi H.,Hironaka Y.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference10 articles.

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

2. Interactions of Water Cluster Ion Beams with Solid Surfaces;Synthesis and Reactivity in Inorganic, Metal-Organic, and Nano-Metal Chemistry;2008-03-01

3. Interactions of liquid cluster ion beams with metal surfaces;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-05

4. Multiparameter characterization of cluster ion beams;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2006