Distribution of carbon in polycrystalline copper surfaces treated by methane plasma immersion ion implantation-Reference-Cited by-同舟云学术

Distribution of carbon in polycrystalline copper surfaces treated by methane plasma immersion ion implantation

Published:2009-05 Issue:8-9 Volume:267 Page:1531-1535
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Flege S.,Kraft G.,Baba K.,Hatada R.,Ensinger W.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference8 articles.

1. Handbook of Plasma Immersion Ion Implantation and Deposition;Anders,2000

2. W. Ensinger, in: R. Wei (Ed.), Plasma Surface Engineering Research and its Practical Applications, Research Signpost, Trivandrum, 2008, p. 135.

3. Sputtering by Particle Bombardment I,1981

4. Surface treatment by ion beams (Chapter 12),1991

5. Corrosion and wear resistant coatings formed by ion beam techniques (Chapter 18),2006

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