A direct current glow discharge plasma source for inner surface modification of metallic tube
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference12 articles.
1. Plasma-based ion implantation and deposition: a review of physics, technology, and applications
2. Running discharge for PECVD inner coating of metal tubes
3. Ion implantation into the interior surface of a steel tube by plasma source ion implantation
4. Inner coating of long-narrow tube by plasma sputtering
5. Development of an energetic ion assisted mixing and deposition process for TiNx and diamondlike carbon films, using a co-axial geometry in plasma source ion implantation
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3. Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube;Applied Surface Science;2017-01
4. Realization of DC atmospheric pressure glow discharge without external airflow;Vacuum;2015-03
5. Fabrication of fine and high-density multithread spirals on inner surfaces of small-diameter pipes using laser scan lithography;Japanese Journal of Applied Physics;2014-05-23
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