Mathematical modeling for the composition prediction of compound films grown by ion-assisted deposition technique and its application to TiNx film-Reference-Cited by-同舟云学术

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Mathematical modeling for the composition prediction of compound films grown by ion-assisted deposition technique and its application to TiNx film

Published:2004-10 Issue:4 Volume:225 Page:509-515
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Kim Jae-Keun,Colligon J.S.,Jeong Sang-Hun

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference15 articles.

1. Characterization of TiBN films grown by ion beam assisted deposition

2. Superhard Ti–Si–N coatings by a hybrid system of arc ion plating and sputtering techniques

3. Ionized physical vapor deposition of titanium nitride: Plasma and film characterization

4. Room temperature synthesis of c-AlN thin films by nitrogen-ion-assisted pulsed laser deposition

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ion Beam-Assisted Deposition;Low-Energy Ion Irradiation of Materials;2022

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