EUV emission from xenon in the 10–80nm wavelength range using a compact ECR ion source-Reference-Cited by-同舟云学术

EUV emission from xenon in the 10–80nm wavelength range using a compact ECR ion source

Published:2005-12 Issue:1-4 Volume:241 Page:23-29
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Merabet H.,Kondagari S.,Bruch R.,Fülling S.,Hahto S.,Leung K.-L.,Reijonen J.,Godunov A.L.,Schipakov V.A.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference15 articles.

1. Light for the next chip generators, Fraunhofer magazine, (2002) 2.

2. K.-L. Leung, V. Bakshi, R. Bruch, S. Hahto, Q. Ji, S. Kondagari, H. Merabet, J. Reijonen, T. Schenkel, The generation of EUV light with a compact ECR source, Ion Beam Technology Group, Lawrence Berkeley National Laboratory.

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