Molecular dynamics simulation of surface deformation via Ar+ ion collision process
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference17 articles.
1. Rapid and three-dimensional nanoimprint template fabrication technology using focused ion beam lithography
2. Silicon micro/nanomechanical device fabrication based on focused ion beam surface modification and KOH etching
3. Electron wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition
4. Focused ion beam direct deposition and its applications
5. Beam-assisted-etching technique for fabrication of single crystal diamond field emitter tip
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effects of Ar ion bombardment on the structure and properties of β-quartz;Ceramics International;2024-08
2. Review on FIB-Induced Damage in Diamond Materials;Current Nanoscience;2016-10-31
3. Molecular dynamic simulation of low-energy FIB irradiation induced damage in diamond;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-09
4. Investigation of focused ion beam induced damage in single crystal diamond tools;Applied Surface Science;2015-08
5. Molecular dynamics simulation of Ga+ ion collision process;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-07
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