Observation of nano-indent induced strain fields and dislocation generation in silicon wafers using micro-Raman spectroscopy and white beam X-ray topography
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference24 articles.
1. Fracture and deformation in brittle solids: A perspective on the issue of scale
2. Mechanics of strength-degrading contact flaws in silicon
3. Phase transformations in materials studied by micro-Raman spectroscopy of indentations
4. Nanoindentation-induced phase transformation in crystalline silicon and relaxed amorphous silicon
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