Influence of ion irradiation on internal residual stress in DLC films-Reference-Cited by-同舟云学术

Influence of ion irradiation on internal residual stress in DLC films

Published:2010-10 Issue:19 Volume:268 Page:3107-3110
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Karaseov Platon A.,Podsvirov Oleg A.,Karabeshkin Konstantin V.,Vinogradov Andrei Ya.,Azarov Alexander Yu.,Karasev Nikita N.,Titov Andrei I.,Smirnov Alexander S.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference16 articles.

1. Diamond-like carbon — present status

2. Amorphous carbon cathodes for field emission display

3. Application of DLC films as masks for integrated circuit fabrication

4. Uniaxial-process-induced strained-Si: extending the CMOS roadmap

5. Mobility enhancement

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