Transfer of thin silicon layers by MeV hydrogen implantation
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference12 articles.
1. Agere Systems Inc., White Paper, March, 2003.
2. Smart-Cut: A New Silicon On Insulator Material Technology Based on Hydrogen Implantation and Wafer Bonding*1
3. J. Grisolia, Ph.D. Thesis, Paul Sabatier University, Toulouse, France, 2000.
4. Silicon on insulator material technology
5. Proximity getterihg by MeV-implantation of carbon: microstructure and carrier lifetime measurements
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