MD study on high-energy reactive carbon and oxygen cluster impact leading to surface erosion on diamond
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference13 articles.
1. Physics and Chemistry of Finite Systems: From Clusters to Crystals;Gspann,1992
2. Micromachining by accelerated nanoparticle erosion
3. REACTIVE ACCELERATED CLUSTER EROSION (RACE)
4. Nanostructures produced by cluster beam lithography
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1. Different Etching Mechanisms of Diamond by Oxygen and Hydrogen Plasma: a Reactive Molecular Dynamics Study;The Journal of Physical Chemistry C;2021-07-21
2. Molecular dynamics simulations of cluster impacts on solid targets: implantation, surface modification, and sputtering;Journal of Computational Electronics;2013-09-12
3. Molecular dynamics simulation study of damage formation and sputtering with huge fluorine cluster impact on silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-05
4. Molecular dynamics study of crater formation by core-shell structured cluster impact;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-07
5. Dependence of energy per molecule on sputtering yields with reactive gas cluster ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2010-10
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