Fundamentals of surfactant sputtering-Reference-Cited by-同舟云学术

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Fundamentals of surfactant sputtering

Published:2009-08 Issue:16 Volume:267 Page:2731-2734
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Hofsäss Hans,Zhang Kun

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference18 articles.

1. Sputtering by Particle Bombardment,1981

2. Sputtering by Particle Bombardment II: Sputtering of Alloys and Compounds,1983

3. Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications,1991

4. Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies;Behrisch,2007

5. Preferential sputtering effects in thin film processing

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