A new secondary ion mass spectrometry (SIMS) system with high-intensity cluster ion source
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference16 articles.
1. Development of a triplasmatron ion source for the generation of SF5+ and F− primary ion beams on an ion microscope secondary ion mass spectrometry instrument
2. Use of an SF[sub 5][sup +] polyatomic primary ion beam for ultrashallow depth profiling on an ion microscope secondary ion mass spectroscopy instrument
3. Negative cesium sputter ion source for generating cluster primary ion beams for secondary ion mass spectrometry analysis
4. A Comparison of Desorption Yields from C+60 to Atomic and Polyatomic Projectiles at keV Energies
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