Molecular dynamics simulations of surface smoothing and sputtering process with glancing-angle gas cluster ion beams
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference10 articles.
1. Non-linear processes in the gas cluster ion beam modification of solid surfaces
2. Gas cluster ion beam applications and equipment
3. Low Damage Smoothing of Magnetic Materials using Oblique Irradiation of Gas Cluster Ion Beam
4. Sidewall polishing with a gas cluster ion beam for photonic device applications
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2. The Effect of Surface Nanostructures Duty Ratio on Their Evolution under Oblique Cluster Ion Beam;Moscow University Physics Bulletin;2019-01
3. Progress and applications of cluster ion beam technology;Current Opinion in Solid State and Materials Science;2015-02
4. Molecular dynamics simulations of cluster impacts on solid targets: implantation, surface modification, and sputtering;Journal of Computational Electronics;2013-09-12
5. Effects of incident cluster size, substrate temperature, and incident energy on bombardment of Ni clusters onto Cu (001) surface studied using molecular dynamics simulation;Applied Surface Science;2012-05
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