Ion permeability of amorphous hydrogen- and fluorine-containing carbon films formed by plasma enhanced chemical vapour deposition
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference11 articles.
1. Mechanical and tribological properties of hard carbon coatings for magnetic recording heads
2. Characterization and properties of diamond-like carbon films for magnetic recording application
3. Handbook of Plasma Immersion Ion Implantation and Deposition,2000
4. Preparation of fluorinated amorphous carbon thin films
5. An apparatus for in-situ or sequential plasma immersion ion beam treatment in combination with r.f. sputter deposition or triode d.c. sputter deposition
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