Open questions in electronic sputtering of solids by slow highly charged ions with respect to applications in single ion implantation-Reference-Cited by-同舟云学术

Open questions in electronic sputtering of solids by slow highly charged ions with respect to applications in single ion implantation

Published:2004-06 Issue: Volume:219-220 Page:200-205
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Schenkel T.,Rangelow I.W.,Keller R.,Park S.J.,Nilsson J.,Persaud A.,Radmilovic V.R.,Grabiec P.,Schneider D.H.,Liddle J.A.,Bokor J.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference26 articles.

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