High energy heavy ion beam lithography in silicon-Reference-Cited by-同舟云学术

High energy heavy ion beam lithography in silicon

Published:2007-08 Issue:1-2 Volume:261 Page:731-735
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Rout Bibhudutta,Dymnikov Alexander D.,Zachry Daniel P.,Eschenazi Elia V.,Wang Yongqiang Q.,Greco Richard R.,Glass Gary A.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference17 articles.

1. Fundamentals of Microfabrication;Madou,1997

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