A simple model for quantifying the degree of layer-by-layer growth in low energy ion deposition of thin films
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference25 articles.
1. Hyperthermal effects on nucleation and growth during low-energy ion deposition
2. Low-energy ion deposition of Co on Ag(001): A molecular dynamics study
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4. Low energy ion assist during deposition — an effective tool for controlling thin film microstructure
5. Simulations of energetic beam deposition: From picoseconds to seconds
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