Technology basis and perspectives on focused electron beam induced deposition and focused ion beam induced deposition-Reference-Cited by-同舟云学术

Technology basis and perspectives on focused electron beam induced deposition and focused ion beam induced deposition

Published:2014-12 Issue: Volume:341 Page:37-43
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Rius Gemma

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference55 articles.

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