Enhancement of c-axis texture of AlN films by substrate implantation
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference18 articles.
1. Epitaxial growth and piezoelectric properties of A1N, GaN, and GaAs on sapphire or spinel
2. Comparative study of the elastic properties of polycrystalline aluminum nitride films on silicon by Brillouin light scattering
3. Thin-film bulk acoustic resonators and filters using ZnO and lead-zirconium-titanate thin films
4. Growth morphology and surface‐acoustic‐wave measurements of AIN films on sapphire
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Plasma characterization for nitridation of aluminium alloy using 50 Hz ac discharge;Plasma Devices and Operations;2008-12
2. P1G-2 Assessment of Aluminum Nitride Films Sputtered on Iridium Electrodes;2007 IEEE Ultrasonics Symposium Proceedings;2007-10
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