Evaluation of cleaning efficiency with a radioactive tracer and development of a microwave digestion method for semiconductor processes

Author:

Lu June-Kuen,Ko Fu-Hsiang,Chu Tieh-Chi,Sun Yuh-Chang,Wang Mei-Ya,Wang Tien-Ko

Publisher

Elsevier BV

Subject

Spectroscopy,Environmental Chemistry,Biochemistry,Analytical Chemistry

Reference24 articles.

1. S.M. Sze, VLSI Technology, 2nd Edition, McGraw-Hill, New York, 1988, Chapter 14.

2. A.V. Ferris-Prabhu, Introduction to Semiconductor Device Yield Modeling, ARTECH HOUSE, MA, 1992, Chapter 1.

3. C.Y. Chang, S.M. Sze, ULSI Technology, McGraw-Hill, New York, 1996.

4. A Survey of Iron Contamination in Silicon Substrates and Its Impact on Circuit Yield

5. Influence of Metal Impurities on Leakage Current of Si N+P Diode

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