Effect of MW-ECR plasma hydrogenation on polysilicon films based solar cells
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Elsevier BV
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1. Phosphorus deactivation mechanisms by hydrogenation in the n+ emitter region and its effect on defects passivation in n+pp+ poly-silicon solar cells;Journal of Ovonic Research;2024-01-01
2. Defects passivation and H-diffusion controlled by emitter region in polysilicon solar cells submitted to hydrogen plasma;Journal of Ovonic Research;2023-09-20
3. Tuning of passivation efficiency of defects in emitter region of polysilicon solar cells using hydrogen plasma;Indian Journal of Physics;2023-09-15
4. Thermal annealing ambiance effect on phosphorus passivation and reactivation mechanisms in silicon-based Schottky diodes hydrogenated by MW-ECR plasma;Semiconductor Physics, Quantum Electronics and Optoelectronics;2021-11-23
5. Mechanism for phosphorus deactivation in silicon-based Schottky diodes submitted to MW-ECR hydrogen plasma;Applied Physics A;2018-09-18
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