Determination of the impact of the wire velocity on the surface damage of diamond wire sawn silicon wafers

Author:

Würzner Sindy,Falke Annemarie,Buchwald Rajko,Möller Hans Joachim

Publisher

Elsevier BV

Reference7 articles.

1. Diamond wire-sawn silicon wafers – from the lab to the cell production;Bidiville;Proc. 24th EU PVSEC,2009

2. Analysis of the sub-surface damage of mc- and cz-Si wafers sawn with diamond-plated wire;Buchwald;Energy Procedia,2013

3. Nondestructive measurement of machining-induced amorphous layers in single-crystal silicon by laser micro-Raman spectroscopy;Yan;Precision Engineering,2008

4. E DIN EN ISO 25178-3:2008-03 /prEN ISO 25178-3:2008 (D). Geometrische Produktspezifikation (GPS) – Oberflächenbeschaffenheit: Flächenhaft – Teil 3: Spezifikationsoperatoren (Entwurf Juli 2008).

5. Laue scanner: A new method for determination of grain orientations and grain boundary types of multicrystalline silicon on a full wafer scale;Lehmann;Acta Materialia,2014

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