Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry
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Publisher
Elsevier BV
Reference3 articles.
1. Fujiwara H. Spectroscopic Ellipsometry - Principles and Applications.(Wiley and Sons, UK, 2003).
2. Spectroscopic ellipsometry characterization of SiNx antireflection films on textured multicrystalline and monocrystalline silicon solar cells;Saenger;Thin Solid Films,2010
3. Jellison GE, Modine FA, Doshi P and Rohatgi A, Spectroscopic ellipsometry characterization of thin-film silicon nitride. Thin Solid Films 1998; 313-314: 193-197.
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