Bombardment Induced Strengthening Of Nitride (BISON) a novel effect in the etch properties of ion implanted LPCVD - Si3N4
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Published:1985-03
Issue:1-3
Volume:129
Page:220-223
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ISSN:0378-4363
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Container-title:Physica B+C
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language:en
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Short-container-title:Physica B+C
Author:
van Ommen A.H.,Maas H.G.R.,Appels J.A.
Subject
General Engineering