Optimization of a horizontal MOCVD reactor for uniform epitaxial layer growth
Author:
Publisher
Elsevier BV
Subject
Fluid Flow and Transfer Processes,Mechanical Engineering,Condensed Matter Physics
Reference14 articles.
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2. A critical appraisal of growth mechanism in MOVPE;Stringfellow;J. Crystal Growth,1984
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4. The influence of axial diffusion on convective heat and mass transfer in a horizontal CVD reactors;Bulsari;J. Crystal Growth,1988
5. Mathematical modeling of cold-wall channel CVD reactors;Holstein;J. Crystal Growth,1989
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