Experimental and numerical analysis of heat transfer phenomena in a sensor tube of a mass flow controller

Author:

Kim Sung Jin,Jang Seok Pil

Publisher

Elsevier BV

Subject

Fluid Flow and Transfer Processes,Mechanical Engineering,Condensed Matter Physics

Reference14 articles.

1. Thermal mass flowmeter;Benson;Instr. Control Syst.,1970

2. Toward understanding the fundamental mechanisms and properties of the thermal mass flow controller;Hinkle;J. Vac. Sci. Technol.,1991

3. Characteristics of a thermal gas flowmeter;Komiya;Rev. Sci. Instr.,1988

4. Design of a new sensor for mass flow controller using thin-film technology based on an analytic thermal model;Rudent;J. Vac. Sci. Technol.,1998

5. Convective Heat and Mass Transfer;Kays,1993

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