The deformation of the moving magnet plate of a commutated magnetically levitated planar actuator-Reference-Cited by-同舟云学术

The deformation of the moving magnet plate of a commutated magnetically levitated planar actuator

Published:2013-03 Issue:2 Volume:23 Page:233-239
ISSN:0957-4158
Container-title:Mechatronics
language:en
Short-container-title:Mechatronics

Author:

Rovers J.M.M.,Achterberg J.,Ronde M.J.C.,Jansen J.W.,Compter J.C.,Lomonova E.A.,van Lierop C.M.M.,van den Molengraft M.J.G.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering

Reference13 articles.

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2. Compter JC, Frissen PCM, van Eijk J. Displacement device for use in electric planar motor, has interferometer system for moving carrier over range of centimeters with respect to electrical coil system. Patent WO 2006/075291 A2, 2006.

3. Korenaga N. Alignment apparatus and exposure apparatus using the same. US patent no. 7,075,198, 2004.

4. Hazelton AJ, Binnard MB, Gery J. Electric motors and positioning devices having moving magnet arrays and six degrees of freedom. US patent no. 6,208,045, 2001.

5. Ironless magnetically levitated planar actuator;Jansen;J Appl Phys,2008

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