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On-chip capacitive sensing and tilting motion estimation of a micro-stage for in situ MEMS gyroscope calibration

  • Published:2018-12 Issue: Volume:56 Page:242-253
  • ISSN:0957-4158
  • Container-title:Mechatronics
  • language:en
  • Short-container-title:Mechatronics

Author:

Chen Yi,Aktakka Ethem Erkan,Woo Jong-Kwan,Najafi Khalil,Oldham Kenn Richard

Funder

National Science Foundation

Defense Advanced Research Projects Agency

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering

Reference20 articles.

1. Strapdown inertial navigation technology;Titterton,2004

2. Integration of DGPS with a low cost MEMS-based inertial measurement unit (IMU) for land vehicle navigation application;Godha,2005

3. An integrated GPS/MEMS-IMU navigation system for an autonomous helicopter;Wendel;Aerosp Sci Technol,2006

4. MEMS vibratory gyroscopes: structural approaches to improve robustness;Acar,2008

5. Micromachined inertial sensors;Yazdi,1998

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