A MEMS-based pneumatic micro-conveyor for planar micromanipulation

Author:

Yahiaoui Réda,Zeggari Rabah,Malapert Julien,Manceau Jean-François

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering

Reference23 articles.

1. Design and fabrication of a gripping tool for micromanipulation;Thornell;Sens Actuators A,1996

2. Development of a novel flexure-based microgripper for high precision micro-object manipulation;Zubir;Sens Actuators A,2009

3. Arai F, Fukuda T. A new pick up and release method by heating for micromanipulation. In: Proceeding of IEEE workshop on micro electro mechanical systems, Nagoya; 1997. p. 383–8.

4. Nakazawa H, Watanabe Y, Morita O, Edo M, Yushima M, Yonezawa E. Electromagnetic micro-parts conveyer with coil-diode modules. In: Proceeding of IEEE international conference of solid-state sensors and actuators “Transducers ‘99”, Miyazaki, Japan; 1999. p. 1192–5.

5. Liu C, Tasao T, Tai YC, Liu W, Will P, Ho CM. A micromachined permalloy magnetic actuator array for micro robotics assembly systems. In: Proceeding of IEEE international conference of solid-state sensors and actuators “Transducers ‘95”, Stockholm, Sweden; 1995. p. 328–31.

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