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Optimal design of high precision XY-scanner with nanometer-level resolution and millimeter-level working range

  • Published:2009-06 Issue:4 Volume:19 Page:562-570
  • ISSN:0957-4158
  • Container-title:Mechatronics
  • language:en
  • Short-container-title:Mechatronics

Author:

Kang Dongwoo,Kim Kihyun,Kim Dongmin,Shim Jongyoup,Gweon Dae-Gab,Jeong Jaehwa

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering

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