Design and quasi-static characteristics study on a planar piezoelectric nanopositioner with ultralow parasitic rotation-Reference-Cited by-同舟云学术

Design and quasi-static characteristics study on a planar piezoelectric nanopositioner with ultralow parasitic rotation

Published:2015-10 Issue: Volume:31 Page:180-188
ISSN:0957-4158
Container-title:Mechatronics
language:en
Short-container-title:Mechatronics

Author:

Lin Hung-Ruei,Cheng Chiao-Hua,Hung Shao-Kang

Funder

Ministry of Science and Technology, Taiwan

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering

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