Author:
Su Susan Xiao-Ping,Yang Henry S.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Civil and Structural Engineering
Reference12 articles.
1. Sniegowski JJ, Smith C. An application of mechanical leverage to microactuation. Transducer 1995; 325 PB 9.
2. Keller CG, Howe RT. Nickel-filled HEXSIL thermally actuated tweezers. Proceedings of the Eighth International Conference on Solid-State Sensors and Actuators (Transducers’95), vol. 1, Stockholm, Sweden, June 1995. p. 376–9.
3. Roessig TA. Surface micromachined resonant accelerometer. PhD dissertation, University of California at Berkeley, 1998.
4. Roessig TA, Howe RT, Pisano AP, Smith JH. Surface-micromachined resonant force sensor. Proceedings of the ASME Dynamic System and Control Division, DSC, vol. 57-2, IMECE, San Francisco, CA, 1995. p. 871–6.
5. Roessig TA, Howe RT, Pisano AP, Smith JH. Surface-micromachined resonant accelerometer. Proceedings of the Ninth International Conference on Solid-State Sensors and Actuators (Transducers’97), Chicago, IL, 1997. p. 859–62.
Cited by
17 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献