Sapphire etching with BCl3/HBr/Ar plasma-Reference-Cited by-同舟云学术

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Sapphire etching with BCl3/HBr/Ar plasma

Published:2003-07 Issue:1-3 Volume:171 Page:280-284
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Jeong C.H.,Kim D.W.,Lee H.Y.,Kim H.S.,Sung Y.J.,Yeom G.Y.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference15 articles.

1. Characteristics of InGaN/AlGaN light-emitting diodes on sapphire substrates

2. Fabrication of thin-film InGaN light-emitting diode membranes by laser lift-off

3. Candela‐class high‐brightness InGaN/AlGaN double‐heterostructure blue‐light‐emitting diodes

4. Superbright Green InGaN Single-Quantum-Well-Structure Light-Emitting Diodes

5. Current and Temperature Dependences of Electroluminescence of InGaN-Based UV/Blue/Green Light-Emitting Diodes

Cited by 25 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Precise Etching Technique of Ultra-Thin Al2O3 Film Using BCl3 Chemistry;2024 Conference of Science and Technology for Integrated Circuits (CSTIC);2024-03-17

2. In situ monitoring of sapphire nanostructure etching using optical emission spectroscopy;Journal of Vacuum Science & Technology B;2023-11-15

3. In situ metrology of direct-write laser ablation using optical emission spectroscopy;Journal of Vacuum Science & Technology B;2023-10-12

4. Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes;Journal of Micromechanics and Microengineering;2022-10-25

5. Sapphire nanophotonics: Fabrication challenges and optical properties;Micro and Nano Engineering;2022-04

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