A study of preferred orientation of vanadium nitride and zirconium nitride coatings on silicon prepared by ion beam assisted deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference17 articles.
1. Ion beam assisted deposition of TiN thin film on Si (100)
2. Low energy ion beam assisted deposition of TiN thin films on silicon
3. Structure and properties of TiN coatings
4. Preferred orientation of TiN films studied by a real time synchrotron x-ray scattering
5. Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering
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